Frequently Asked Questions

Qualtx Technology designs, builds, and installs complete turn-key control system solutions for semiconductor and nanotechnology process equipment. Founded in 1997, Qualtx specializes in two core services: (1) retrofitting and upgrading existing process tools by replacing aging proprietary control systems with modern, open hardware and software, and (2) designing entirely new control systems for R&D facilities and original equipment manufacturers (OEMs). Every project includes both the control hardware (I/O systems, wiring, power supplies) and fully custom control software.

Qualtx has extensive experience with plasma etch systems (RIE, RFPECVD), ECR systems, MOCVD reactors, Ion Mills, Ion Implanters, Sputter Deposition systems, vacuum bake-out ovens, and other semiconductor and nanotechnology process tools. We are the recognized leader in PlasmaTherm system retrofits among third-party providers.

Qualtx Technology, Inc. is a small business based in Plano, Texas. This means customers work directly with our engineers — not account managers or layers of bureaucracy. Kevin Miller, President and Automation Engineer, is directly involved in every project.

A retrofit is the complete replacement of a process tool’s existing control hardware and software with modern, non-proprietary components. The process tool itself — the chamber, vacuum system, gas delivery, and RF hardware — stays in place. Only the control system (the I/O electronics, wiring, and software) is replaced. The result is a tool that operates like new, with modern software features, for a fraction of the cost of a new tool purchase.

Once the proprietary sequencer and I/O system of an older tool begin to fail, little can be done to extend its life without a retrofit. A Qualtx retrofit is the cost-effective alternative. Key reasons customers choose a retrofit:

• Cost — significantly less expensive than a new tool (a typical PlasmaTherm single-chamber retrofit is $29,750, compared to hundreds of thousands for a new tool)
• Preserve your validated process — keep the chamber you’ve already characterized and qualified
• Eliminate proprietary lock-in — replace obsolete OEM systems with open, off-the-shelf hardware and source code you own
• Modern features — add automated recipe control, data logging, multi-user access, and improved safety interlocks
• Speed — a retrofit can restore a down tool in 8–12 weeks; a new tool takes far longer to procure and qualify

A Qualtx retrofit is a complete turnkey solution. Everything included:

• All new I/O hardware: AutomationDirect P1000 PLC with Analog Input, Analog Output, Digital Input, and Digital Output modules
• New PC/laptop running Windows 11 with 1920×1080 display, keyboard, and trackpad
• New DC power supplies (24 VDC for signals/solenoids; ±15 VDC for components)
• Complete signal wiring and cable harness replacement
• Fully custom control software (Windows Forms application written in C#)
• Wiring diagrams, I/O lists, and OEM documentation for all I/O modules
• On-site installation, commissioning, and operator/engineer training (typically 5 days on-site)
• 12 months of free software updates and enhancements post-installation
• Lifetime free software bug fixes (while software is not in end-of-life status)

Qualtx uses the AutomationDirect P1000 PLC as an Ethernet-based I/O platform. The P1000 provides Analog Input, Analog Output, Digital Input, and Digital Output modules. Critically, the PLC is used purely as I/O — it is not the system controller. All system sequencing, recipe logic, interlocks, and process control run in the Windows software, which communicates with the PLC over Ethernet. This architecture gives customers a modern, easily maintainable system using widely available, off-the-shelf hardware.

Qualtx writes fully custom control software as Windows Forms applications in C# (.NET). The software runs on a Windows 11 PC and communicates with the AutomationDirect P1000 I/O hardware over Ethernet. Each software package is custom-developed for the specific process tool and customer requirements — it is not a generic SCADA package or OEM black-box system. Customers receive the full source code. Note, there is an additional charge for source code.

Yes. Providing customers with full source code is a core principle at Qualtx. You will never be locked into Qualtx or any other vendor for future software changes. Your engineering team — or any qualified C# developer — can modify the software independently. This is one of the key advantages of a Qualtx retrofit over proprietary OEM systems. Note, there is an additional charge for source code.

The Qualtx control software is a production-ready, fully featured application — not alpha or beta. Standard features include:

• Manual operation mode and fully automated recipe-driven mode
• Unlimited recipe storage with per-user recipe directories and recipe sharing
• Comprehensive data logging (CSV format, organized by date and lot name, compatible with Excel)
• Multi-user login with Engineer and Operator access levels, with user activity tracking
• Schematic system view showing live status of vacuum, gas delivery, valves, and sensors
• Configuration Manager for adjusting component parameters (MFC sizes, temperature controllers, Baratrons, etc.) without code changes
• Alarm history and system message log
• Integrated wiring diagrams and component manuals accessible from within the software

Yes. Every Qualtx software installation is customized for the specific tool. The Configuration Manager allows end users to adjust component parameters (such as MFC ranges, pressure sensor types, and temperature controller configurations) without requiring code changes. For larger customizations, Qualtx works directly with the customer’s engineering team to define and implement required functionality.

Due to a contractual relationship with Verity Instruments, Qualtx is unable to incorporate endpoint detection algorithms or related functionality within the control system software. If endpoint detection is required for your process, this should be discussed during the project scoping phase so that third-party endpoint detection hardware can be integrated appropriately.

A typical PlasmaTherm 700/790 Series single-chamber RIE retrofit (manually loaded, no load lock) is priced at $29,750. This is a fixed-price, all-inclusive quote covering all hardware, custom software, on-site installation, travel, and training. Dual-chamber and systems with load locks or load arms will vary. Contact Qualtx for a project-specific quote.

Payment is structured in two equal installments:

• 50% ($14,875 for a standard single-chamber retrofit) is due at time of Purchase Order, payable via ACH or wire transfer
• 50% is due NET 30 days upon completion of installation

Customers who prefer NET 30 payment of the full balance upon project completion may do so with an additional fee of $5,000. All applicable taxes, transaction fees, and wire transfer fees are the responsibility of the customer.

Two delivery timelines are available:

• Standard: 8–12 weeks from receipt of Purchase Order
• Expedited: Approximately 6 weeks from receipt of Purchase Order, with an additional expedite fee of $6,500 (covers priority scheduling, expedited shipping, manufacturing overtime, and urgent travel arrangements)

Note: Delivery and installation schedules exclude the weeks of Thanksgiving, Christmas, and New Year’s.

Qualtx provides approximately 5 days of on-site labor to install all hardware, rewire the tool to the new I/O system, load and configure the software, and perform full commissioning and acceptance testing. This includes all travel and on-site costs. Training for engineers and operators is also conducted during this visit. Only one installation trip is included in the standard price; additional return trips (e.g., if facilities are not ready) are billed separately at $1,750/day plus travel.

For a successful single-trip installation, the process tool must be in working order at the start of the installation visit. Specifically:

• Gas delivery to all MFCs must be operational (N₂ is acceptable for testing)
• Roughing and blower pumps must be functioning
• Facilities infrastructure (power, gas, vacuum) must be sufficient for software integration testing
• No other vendors may work on the process tool or related facilities during the Qualtx installation period

If the tool is not fully operational at the start of installation, work may still proceed, but any required return trips will be billed at the customer’s expense.

All Qualtx quotations are valid for ninety (90) days from the date of issue. After that period, pricing may be subject to revision based on current hardware costs and scheduling availability.

Qualtx provides two tiers of post-installation software support:

• First 12 months: All software bug fixes AND enhancements (changes, modifications, new features) are provided free of charge from the date of final invoice
• Life of the tool: Software bug fixes are provided free of charge for as long as the Qualtx software is not in end-of-life status

After the first 12-month period, software additions and enhancements are available at Qualtx’s standard software engineering rate.

Yes. The software includes a built-in timeout mechanism tied to payment terms. Failure to pay invoices within NET 30-day terms will result in automatic expiration of the software license, rendering the process tool inoperable until all outstanding invoices are paid. This mechanism protects Qualtx’s ability to continue providing support and development services.

Yes. In addition to retrofits, Qualtx designs complete control systems from scratch for new process tools. We work directly with your engineering team to define I/O requirements, gas and vacuum control logic, safety interlocks, RF power control, process sequencing, and the user interface. This service is commonly used by OEMs developing new products and R&D facilities building one-of-a-kind research tools.

Qualtx has delivered control systems for RIE/RFPECVD plasma etch systems, ECR plasma systems, MOCVD reactors, Ion Mills, Ion Implanters, Sputter Deposition systems, and vacuum bake-out ovens. If your equipment involves precise control of gases, vacuum, temperature, RF power, or automated process sequencing, Qualtx can engineer a solution.

Yes. Qualtx can design control systems with fab automation integration requirements in mind. Discuss your specific automation, networking, and communication protocol requirements during the project scoping phase to ensure these are included in the design specification.